Journal of Vacuum Science and Technology.B. Microelectronics and Nanometer Structures. Processing, Measurement and Phenomena (USA)

Год: Том (Номера) / Year: Volume (Numbers)

2017: 35(1,2)

2016: 34(1,4,6)

2015: 33(1,2)

2014: 32(1,3,4,5)

2013: 31(3,5)

2012: 30(5,6)

2008: 26(1)

2006: 24(1)

2004: 22(1,2,3)

2002: 20(6)

1999: 17(1,2)

1998: 16(1)

1997: 15(1,2,3)

1994: 12(1,3,4,5,6)

1993: 11(1,2,3,5,6)

1991: 9(1,2 PT 1,2 PT 2,3,4,5,6)

1990: 8(1,2,3,4,5)